Large-Aperture, Single-Module XY Piezo Flexure NanoPositioner and Scanner

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The product You were Looking for was moved Click Here for new Address P-770 Large-Aperture, Single-Module XY Piezo Flexure NanoPositioner and Scanner Precision Trajectory Control Single-Module, Parallel-Kinematics Design Features Enhanced Responsiveness and Automatic Runout Compensation For XY Scanning and Positioning 200 x 200 mm Clear Aperture 200 x 200 µm Range Resolution < 10 nm P-770 is a low-profile, highly accurate, XY scanning and positioning system, providing a positioning and scanning range of 200 X 200 µm with better than 10 nm resolution. The P-770 was specially designed for semiconductor inspection systems. The 200 x 200 mm clear aperture is ideal for all transmitted-light applications, such as mask alignment. Parallel Kinematics A major advantage of the single-module, parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details). Working Principle P-770 positioners are equipped with low-voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated LVDT (linear variable differential transformer) position feedback sensors provide high resolution and stability in closed-loop operation (with PI electronics, as recommended below). Metrology Nanopositioning Semiconductor test equipment Precision mask and wafer alignment Scanning interferometry Surface structure analysis, etc. P-770 Flexure NanoPositioner Variety of small- and large-aperture NanoPositioners. Call your PI Sales Engineer for your application. P-770 dimensions (in mm)

Technical Data

Models	P-770.00	Units	Notes see link
Active axes	X,Y
Open-loop travel @ 0 to 100 V	200	µm ±20%	A2
Closed-loop travel ³	200	µm	A5
Integrated feedback sensor	LVDT		B
Closed-loop / open-loop ** resolution £	10 / 2	nm	C1
Closed-loop linearity (typ.)	0.1	%
Full-range repeatability (typ.)	±20	nm	C3
Stiffness	0.2	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	50 / 10	N	D3
Max. (+/-) normal load	2	kg	D4
Electrical capacitance	14.4 / axis	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	12 / axis	µA/(Hz x µm)	F2
Unloaded resonant frequency	90	Hz ±20%	G2
Operating temperature range	- 20 to 80	°C	H2
Voltage connection ***	D		J1
Sensor connection ***	D		J2
Weight	2000	g ±5%
Body material	Al		L
Recommended Amplifier/Controller (codes explained see link)	H, F
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 6 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier. *** Adapter cable with LEMO connectors for sensor and operating voltage included.

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P-770.00
Large-Aperture XY PZT Flexure Stage, 200 µm, LVDT Sensor

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