Single-Module, XY Piezo Flexure NanoPositioners and Scanners

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Single-Module, XY Piezo Flexure NanoPositioners and Scanners

 

The product You were Looking for was moved Click Here for new Address P-734 Single-Module, XY Piezo Flexure NanoPositioners and Scanners Single-Module, Parallel-Kinematics Design Features Enhanced Responsiveness and Automatic Runout Compensation Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy Flatness in the Low Nanometer Range 100 x 100 µm Travel Range Integrated Capacitive Sensors for Resolution < 1 nm 56 x 56 mm Clear Aperture P-734 NanoPositioning stages are fast and highly accurate, low-profile, XY scanning and positioning systems. They provide a positioning and scanning range of 100 x 100 µm and are equipped with capacitive feedback sensors for highest accuracy and repeatability in the nanometer and sub-nanometer range. Ultra-Precise Trajectory Control The P-734 features an ultra-precise flexure guiding system, confining motion to the XY plane and reducing runout in Z to a few nanometers or less. This unsurpassed trajectory precision is fundamental for precise surface inspection and scanning microscopy measurements. Higher Precision through Parallel Kinematics/ Metrology P-734 piezo scanning stages are equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform rather than strain in the actuator (as is common with lower-precision strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes. A major advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability, enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section (see link) ff. for further details). Clear Aperture The 56 x 56 mm clear aperture is ideal for transmitted-light applications, such as near-field scanning microscopy, confocal microscopy or mask alignment. P-734 stages are designed for applications with loads up to 2 kg. Working Principle P-734 NanoPositioners are equipped with low-voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide sub-nanometer resolution and stability in closed-loop operation (with PI electronics). Scanning microscopy Metrology Surface structure analysis Semiconductor test equipment Precision mask and wafer alignment Scanning interferometry Imaging (resolution enhancement) Biotechnology Micromanipulation and other applications where single-plane high-precision XY motion is required P-734 flexure NanoPositioner with ultra-precise trajectory control P-734 dimensions (in mm) The typical flatness of P-734 motion is in the low nanometer range.

Technical Data

Models	P-734.2CL	P-734.2CD	Units	Notes see link
Active axes	X,Y	X,Y
Open-loop travel @ 0 to 100 V	100 x 100	100 x 100	µm ±20%	A2
Closed-loop travel ³	100 x 100	100 x 100	µm	A5
Integrated feedback sensor	2 x capacitive	2 x capacitive		B
Closed-loop / open-loop ** resolution £	0.3 / 0.2	0.3 / 0.2	nm	C1
Closed-loop linearity (typ.)	0.03	0.03	%
Full-range repeatability (typ.)	±2.5	±2.5	nm	C3
Stiffness	3	3	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	300 / 100	300 / 100	N	D3
Max. (±) normal load	2	2	kg	D4
Electrical capacitance	7.2 / axis	7.2 / axis	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	9 / axis	9 / axis	µA/(Hz x µm)	F2
Unloaded resonant frequency	500	500	Hz ±20%	G2
Resonant frequency @ 200 g load	350	350	Hz ±20%	G3
Resonant frequency @ 500 g load	250	250	Hz ±20%	G3
Operating temperature range	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	2 x VL	sub-D, special		J1
Sensor connection	4 x C	sub-D, special		J2
Weight (with cables)	580	580	g ±5%
Body material	Al	Al		L
Recommended Amplifier/Controller (codes explained see link)	H, E, L	K
* -Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 2.7 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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P-734.2CL
XY PZT Flexure Stage, Ultra-Precision Trajectory Control, 100 x 100 µm, Capacitive Sensors, Lemo Connectors

P-734.2CD
XY PZT Flexure Stage, Ultra-Precision Trajectory Control, 100 x 100 µm, Capacitive Sensors, sub-D Connector

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