XY and XYZ PZT Flexure NanoPositioners and Scanners
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XY and XYZ PZT Flexure NanoPositioners and Scanners
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Technical DataModels P-281.10 P-281.20 P-281.30 P-282.10 P-282.20 P-282.30 Axes X,Z (X,Y) X,Z (X,Y) X,Z (X,Y) X,Y,Z X,Y,Z X,Y,Z Displacement 30 X 30 µm 50 X 50 µm 100 X 100 µm 30 X 30 X 30 µm 50 X 50 X 50 µm 100 X 100 X 100 µm Consists of 2 X P-280.10 2 X P-280.20 2 X P-280.30 3 X P-280.10 3 X P-280.20 3 X P-280.30 Cable Position* A + C A + C A + C A + B + C A + B + C A + B + C * See P-280 dimensional drawing see link.