PZT Flexure NanoPositioners and Scanners
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PZT Flexure NanoPositioners and Scanners
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Technical DataModels P-280.10 P-280.20 P-280.30 Units Notes see p. see link Active axes X X X Open-loop travel @ 0 to -1000 V 30 50 100 µm ±20% A4 ** Open-loop resolution £ 0.3 0.5 1 nm C0 Stiffness 1.4 1.3 0.5 N/µm ±20% D1 Push/pull force capacity (in operating direction) 50/50 50/50 50/50 N D3 Max. (±) normal load 5 5 5 kg D4 Tilt (θY, θZ) (typ.) 3 7 9 µrad E1 Lateral runout (Z) (typ.) 0.3 0.6 1.4 µm E2 Electrical capacitance 20 27 70 nF ±20% F1 * Dynamic operating current µA/ coefficient (DOCC) 0.83 0.68 0.88 (Hz 3 µm) F2 Unloaded resonant frequency 2200 1300 660 Hz ±20% G2 Operating temperature range - 40 to 80 - 40 to 80 - 40 to 80 °C H2 Voltage connection VH VH VH J1 Weight (with cables) 37 56 92 g ±5% Body material Al Al Al L Recommended Amplifier/ Controller (codes explained see link) B, I B, I B, I * Dynamic Operating Current Coefficient in µA per hertz and µm.
Example (P-280.30): Sinusoidal scan of 30 µm at 10 Hz requires approximately 0.26 mA drive current.
** Resolution of PZT NanoPositioners is not limited by friction or stiction.
Noise equivalent motion with E-507 amplifier.
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P-280.10*
Piezo Flexure Stage, 30 µm
P-280.20*
Piezo Flexure Stage, 50 µm
P-280.30*
Piezo Flexure Stage, 100 µm
* = A, B or C depending on cable
position
Custom Designs
for Volume Buyers