LISA NanoAutomation^® Stage Actuators

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LISA NanoAutomation^® Stage Actuators

 

The product You were Looking for was moved Click Here for new Address P-753 LISA NanoAutomation® Stage Actuators Unique Design: Both Stage and Actuator Ultra-compact Precision Trajectory Control 0.05 nm Resolution Ultra-Fast Response ID Chip for AutoCalibrate Function The P-753 NanoAutomation® stage actuators are extremely fast and compact devices, providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely low rotational error. P-753 stages combine the small dimensions of a PZT stack actuator with the precise trajectory control of a flexure stage. They can be used both as linear actuators and as translation stages with extremely precise guiding systems. They are equipped with capacitive feedback sensors providing sub-nanometer resolution and stability. Highly Responsive Careful attention to mass minimization results in significant reduction in inertial recoil forces applied to the supporting structures, enhancing overall system throughput and stability. AutoCalibration For optimized operation and interchangeability of the nanomechanics and controller, models P-753.xCD are equipped with an ID chip which holds all calibration data and sends it to the digital controller (e.g. E-750.CP) when powered up. Models P-753.xxC can be used with analog and digital controllers. Working Principle P-753 stages are equipped with low-voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. An integrated capacitive position feedback sensor provides sub-nanometer resolution and stability in closed-loop operation (with PI electronics). Disk drive testing FBG writing (fiber Bragg gratings) Metrology NanoPositioning Scanning microscopy Photonics Scanning interferometry Biotechnology Micromanipulation P-753.11C LISA linear stage actuators, used as stage (left) and actuator (right) P-753.11C dimensions (in mm), max. torque at M2.5 threads: 30 Ncm. P-753.21C dimensions (in mm), max. torque at M2.5 threads: 30 Ncm. P-753.31C dimensions (in mm), max. torque at M2.5 threads: 30 Ncm. Group of E-750 Digital NanoAutomation® controllers with P-753.1CD P-753.2CD and P-753.3CD LISA linear stage actuators

Technical Data

Models	P-753.11C	P-753.21C	P-753.31C	P-753.1CD	P-753.2CD	P-753.3CD	Units	Notes see link
Active axes	X	X	X	X	X	X
Open-loop travel @ 0 to 100 V	12	25	38	12	25	38	µm ±20%	A2
Closed-loop travel ³	12	25	38	12	25	38	µm	A5
Integrated feedback sensor	capacitive	capacitive	capacitive	capacitive	capacitive	capacitive		B
Closed-loop / open-loop ** resolution £	0.05 / 0.05	0.1 / 0.1	0.2 / 0.2	0.05 / 0.05	0.1 / 0.1	0.2 / 0.2	nm	C1
Closed-loop linearity (typ.)	0.03	0.03	0.03	0.03	0.03	0.03	%
Full-range repeatability (typ.)	±1	±2	±3	±1	±2	±3	nm	C3
Stiffness	45	24	16	45	24	16	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	100 / 20	100 / 20	100 / 20	100 / 20	100 / 20	100 / 20	N	D3
Max. normal load (vertical/horizontal operation)	10 / 2	10 / 2	10 / 2	10 / 2	10 / 2	10 / 2	kg	D4
Lateral force limit	30	30	30	30	30	30	N	D5
Electrical capacitance	1.8	3.6	5.4	1.8	3.6	5.4	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	18	18	18	18	18	18	µA/(Hz 3 µm)	F2
Unloaded resonant frequency	5.6	3.7	2.9	5.6	3.7	2.9	kHz ±20%	G2
Resonant frequency @ 200 g load	2.5	1.7	1.4	2.5	1.7	1.4	kHz ±20%	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	VL	VL	VL	ID	ID	ID	J1
Sensor connection	2 X C	2 X C	2 X C	ID	ID	ID		J2
Weight (with cables)	150	205	250	160	215	260	g ±5%
Body material	S	S	S	S	S	S		L
Recommended Amplifier/Controller (codes explained see link)	H, F, L	H, F, L	H, F, L	M	M	M
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 10 µm at 10 Hz requires approximately 1.8 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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P-753.11C
LISA PZT NanoAutomation^® Stage Actuator, 12 µm, Capacitive Sensor, Lemo Connector

P-753.21C
LISA PZT NanoAutomation^® Stage Actuator, 25 µm, Capacitive Sensor, Lemo Connector

P-753.31C
LISA PZT NanoAutomation^® Stage Actuator, 38 µm, Capacitive Sensor, Lemo Connector

P-753.1CD
LISA PZT NanoAutomation^® Stage Actuator, 12 µm, Capacitive Sensor, sub-D Connector

P-753.2CD
LISA PZT NanoAutomation^® Stage Actuator, 25 µm, Capacitive Sensor,sub-D Connector

P-753.3CD
LISA PZT NanoAutomation^® Stage Actuator, 38 µm, Capacitive Sensor, sub-D Connector

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