PZT NanoAutomation^® Stages

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The product You were Looking for was moved Click Here for new Address P-752 PZT NanoAutomation® Stages Ideal for Disk Drive Testing Writing Fiber Bragg Gratings Ultra-Fast Response Ultra-Precise Trajectory Control Digital Controllers with fast FiberLink Interface Available ID Chip for AutoCalibrate Function Feedforward Techniques for Elimination of Self-Generated Resonances Available 0.1 nm Resolution The P-752 NanoAutomation® stages are extremely compact and fast devices, providing a positioning and scanning range up to 30 µm with very fast settling time and extremely low rotational error. P-752 stages were specially designed for disk drive testing applications, with loads of a few 100 grams. They are equipped with capacitive feedback sensors providing sub-nanometer resolution and stability. Highly Responsive Careful attention to mass minimization results in significant reduction in inertial recoil forces applied to the supporting structures, enhancing overall system throughput and stability. In combination with the E-612 controller, the 15 µm stage (with a 300 g load) settles to better than 0.1% in 17 msec-significantly faster than conventional systems. AutoCalibration For optimized operation and interchangeability of the nanomechanics and controller, models P-752.xCD are equipped with an ID chip which holds all calibration data and sends it to the digital controller (e.g. E-750.CP) when powered up. Models P-752.x1C can be used with analog and digital controllers. Working Principle P-752 stages are equipped with low-voltage piezoelectric drives (0 to 100V) integrated into a sophisticated flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, ultra-high-resolution and exceptional guiding precision. An integrated capacitive position feedback sensor provides sub-nanometer resolution and stability in closed-loop operation (with PI electronics). Disk drive testing FBG writing (fiber Bragg gratings) Metrology Nanopositioning Scanning microscopy Fiber optics Scanning interferometry Biotechnology Micromanipulation P-752.11C NanoAutomation Stage Typical 0.5 µrad bidirectional trajectory repeatability (P-752.11C stage) means processes may be performed bidirectionally for twice the productivity. Response of a P-752.11C to a square wave control signal shows true sub-nm positional stability, incremental motion and bidirectional repeatability (measured with E-501 & E-503.00 & E-509.C1 controller, bandwidth set to 240 Hz). P-752.11C dimensions (in mm) P-752.21C dimensions (in mm)

Technical Data

Models	P-752.11C	P-752.21C	P-752.1CD	P-752.2CD	Units	Notes see link
Active axes	X	X	X	X
Open-loop travel @ 0 to 100 V	20	35	20	35	µm ±20%	A2
Closed-loop travel ³	15	30	15	30	µm	A5
Integrated feedback sensor	capacitive	capacitive	capacitive	capacitive		B
Closed-loop / open-loop ** resolution £	0.1/0.1	0.2/0.2	0.1/0.1	0.2/0.2	nm	C1
Closed-loop linearity (typ.)	0.03	0.03	0.03	0.03	%
Full-range repeatability (typ.)	±1	±2	±1	±2	nm	C3
Stiffness	30	20	30	20	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	100 / 10	100 / 10	100 / 10	100 / 10	N	D3
Max. (±) normal load	3	3	3	3	kg	D4
Lateral force limit	30	30	30	30	N	D5
Tilt (θY, θZ) (typ.)	1	1	1	1	µrad	E1
Electrical capacitance	2.7	4.5	2.7	4.5	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	22	19	22	19	µA/(Hz X µm)	F2
Unloaded resonant frequency	3200	2100	3200	2100	Hz ±20%	G2
Resonant frequency @ 300 g load	980	600	980	600	Hz ±20%	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	VL	VL	ID	ID		J1
Sensor connection	2 X C	2 X C	ID	ID		J2
Weight (with cables)	250	350	260	360	g ±5%
Body material	N-S	N-S	N-S	N-S
Recommended Amplifier/Controller (codes explained see link)	H, F, L	H, F, L	M	M
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 10 µm at 10 Hz (P-752.11C) requires approximately 2.2 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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P-752.11C
PZT NanoAutomation^® Stage, 15 µm, Capacitive Sensor, Lemo Connector

P-752.21C
PZT NanoAutomation^® Stage, 30 µm, Capacitive Sensor, Lemo Connector

P-752.1CD
PZT NanoAutomation^® Stage, 15 µm, Capacitive Sensor, sub-D Connector

P-752.2CD
PZT NanoAutomation^® Stage, 30 µm, Capacitive Sensor, sub-D Connector

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