Piezo Flexure NanoPositioners and Scanners

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The product You were Looking for was moved Click Here for new Address P-750 Piezo Flexure NanoPositioners and Scanners 1nm Lateral Guiding Precision Resolution < 1 nm Fast Response 75 µm Range 10 kg Load Capacity P-750 Piezo Flexure NanoPositioners are designed to provide motion in one axis with extremely low off-axis error. They provide a positioning and scanning range up to 75 µm with settling time of a few milliseconds. Closed-loop versions with integrated capacitive and LVDT (linear variable differential transformer) feedback sensors are offered for enhanced accuracy and repeatability. Working Principle The P-750 is equipped with a low-voltage piezoelectric drive (0 to 100 V) integrated into a sophisticated flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated position feedback sensors (LVDT or capacitive) provide subnanometer resolution and stability in closed-loop operation (with PI electronics, as recommended). Metrology Disk drive testing Wafer steppers Semiconductor equipment. P-750.10 Flexure NanoPositioner P-750 dimensions (in mm)

Technical Data

Models	P-750.00	P-750.10	P-750.20	Units	Notes see link
Active axes	X	X	X
Open-loop travel @ 0 to 100 V	75	75	75	µm ±20%	A2
Closed-loop travel ³	-	75	75	µm	A5
Integrated feedback sensor	-	LVDT	capacitive		B
Closed-loop / open-loop ** resolution £	- / 1	10 / 1	1 / 1	nm	C1
Closed-loop linearity (typ.)	-	0.1	0.03	%
Full-range repeatability (typ.)	-	±20	±3	nm	C3
Stiffness	12	12	12	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	800 / 100	800 / 100	800 / 100	N	D3
Max. (+/-) normal load	10	10	10	kg	D4
Lateral force limit	50	50	50	N	D5
Tilt (θY, θZ) (typ.)	10	10	10	µrad	E1
Lateral runout (Y) (typ.)	1	1	1	nm	E2
Electrical capacitance	9	9	9	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	15	15	15	µA/(Hz X µm)	F2
Unloaded resonant frequency	600	600	600	Hz ±20%	G2
Resonant frequency @ 1900 g load	250	250	250	Hz ±20%	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	VL	VL	VL		J1
Sensor connection	-	L	2 X C		J2
Weight (with cables)	2500	2550	2550	g ±5%
Body material	N-S	N-S	N-S		L
Recommended Amplifier/Controller (codes explained see link)	G, C	H, E	H, F, L
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 4.5 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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P-750.00
PZT Flexure Stage, 75 µm

P-750.10
PZT Flexure Stage, 75 µm, LVDT
Sensor

P-750.20
PZT Flexure Stage, 75 µm,
Capacitive Sensor

Custom Designs for Volume Buyers