Miniature Piezo Flexure NanoPositioners and Scanners

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Miniature Piezo Flexure NanoPositioners and Scanners

 

The product You were Looking for was moved Click Here for new Address P-780 Miniature Piezo Flexure NanoPositioners and Scanners Extremely Compact 80 µm Travel Range Resolution < 5 nm Fast Response (1 kHz Resonant Frequency) P-780 piezo flexure stages are extremely compact and fast devices, providing a positioning and scanning range of up to 80 µm with settling time of only a few milliseconds. The P-780 is designed for applications with loads up to 100 g. Both open-loop and closed-loop versions with integrated LVDT (linear variable differential transformer) feedback sensors are offered to suit your application. Working Principle The P-780 is equipped with a low-voltage piezoelectric drive (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. An integrated LVDT position feedback sensor provides nanometer-scale resolution and stability in closed-loop operation (with PI electronics as recommended below). Metrology Nanopositioning Scanning microscopy Disk drive testing Fiber optics Scanning interferometry Biotechnology Micromanipulation P-780 Flexure NanoPositioner P-780 dimensions (in mm) Wire EDM cutting process being used on a P-780 flexure NanoPositioner

Technical Data

Models	P-780.00	P-780.20	Units	Notes see link
Active axes	X	X
Open-loop travel @ 0 to 100 V	80	80	µm ±20%	A2
Closed-loop travel ³	-	80	µm	A5
Integrated feedback sensor	-	LVDT		B
Closed-loop / open-loop ** resolution £	- / 1	5 / 1	nm	C1
Closed-loop linearity (typ.)	-	0.1	%
Full-range repeatability (typ.)	-	±20	nm	C3
Stiffness	1.5	1.5	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	50 / 5	50 / 5	N	D3
Max. (+/-) normal load	1	1	kg	D4
Lateral force limit	10	10	N	D5
Lateral runout (X/Y/Z) (typ.)	10	10	nm	E2
Electrical capacitance	3.6	3.6	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	5.6	5.6	µA/(Hz X µm)	F2
Unloaded resonant frequency	1000	1000	Hz ±20%	G2
Resonant frequency @ 100 g load	600	600	Hz ±20%	G3
Operating temperature range	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	VL	VL		J1
Sensor connection	-	L		J2
Weight (with cables)	150	170	g ±5%
Body material	N-S	N-S		L
Recommended Amplifier/Controller (codes explained see link)	G, C	H, E
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 1.7 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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P-780.00
Miniature PZT Flexure Stage, 80 µm

P-780.20
Miniature PZT Flexure Stage, 80 µm, LVDT Sensor

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