Ultra-Compact PZT NanoAutomation® Stages

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P-772
Ultra-Compact PZT NanoAutomation® Stages
  • Ideal for Head/Media Test & Fiber Optics
  • Smallest Flexure-Guided Stage with Capacitive Feedback
  • Resolution <0.1 nm
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID Chip for Auto Calibrate Function






P-772 NanoAutomation® stages are the smallest flexure-guided NanoPositioners with integrated capacitive feedback currently available on the market. They provide a positioning and scanning range of up to 10 µm, sub-nanometer resolution and ultra-fast response. P-772 stages are designed for applications with loads up to 100 grams.

AutoCalibration
For optimized operation and interchangeability of the nanomechanics and controller, model P-772.1CD is equipped with an ID chip which holds all calibration data and sends it to the digital controller (e.g. E-750.CP) when powered up. Model P-772.1CL can be used with analog and digital controllers.

Working Principle
P-772 are equipped with a low-voltage piezoelectric drive (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. An integrated capacitive position feedback sensor provides sub-nanometer-scale resolution and stability in closed-loop operation (with PI servo-control electronics).
  • Head/media test
  • Disk drive test
  • Laser tuning
  • Fiber optics
  • Metrology
  • Nanopositioning
  • Scanning microscopy
  • Scanning interferometry
  • Biotechnology
  • Micromanipulation, etc.
P-772.1CD Flexure NanoPositioner (DIP switch for size comparison)

P-772.1CD Flexure NanoPositioner (DIP switch for size comparison)


P-772.1CD dimensions (in mm)

P-772.1CD dimensions (in mm)


Technical Data
ModelsP-772.1CDP-772.1CLUnitsNotes see link

Active axesXX

Open-loop travel @ 0 to 100 V1212µm ±20%A2

Closed-loop travel ³1010µmA5

Integrated feedback sensorcapacitivecapacitiveB

Closed-loop / open-loop ** resolution £0.05 / 0.050.05 / 0.05nmC1

Closed-loop linearity (typ.) ***0.03 0.03 %

Full-range repeatability (typ.)±1±1nmC3

Stiffness 77N/µm ±20%D1

Push/pull force capacity (in operating direction)50 / 550 / 5ND3

Max. (+/-) normal load0.50.5kgD4

Lateral force limit1010ND5

Electrical capacitance 0.90.9µF ±20%F1

* Dynamic operating current coefficient (DOCC)99µA/(Hz X µm)F2

Unloaded resonant frequency 17001700Hz ±20%G2

Operating temperature range- 20 to 80- 20 to 80°CH2

Voltage connectionDVLJ1

Sensor connection D2 3 CJ2

Weight (w/o cables)170170g ±5%

Body materialN-SN-SL

Recommended Amplifier/Controller (codes explained see link) MH, F, L

* Dynamic Operating Current Coefficient in µA per hertz and µm.
Example: Sinusoidal scan of 10 µm at 10 Hz requires approximately 0.9 mA drive current.
** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503, E-710
*** with digital controller


To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

P-772.1CD
Ultra-Compact NanoAutomation® Stage, Capacitive Sensor, AutoCalibrate, Sub-D Connector

P-772.1CL
Ultra-Compact NanoAutomation® Stage, Capacitive Sensor,
Lemo Connector

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