PICMA™ Chip Monolithic Multilayer Piezo Actuators

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PL022
PL033
PL055
PICMA™ Chip Monolithic Multilayer Piezo Actuators
  • Ceramic Insulation for Extended Lifetime
  • Ultra-Compact from 2x2x2 mm³
  • High Curie Temperature
  • Ideal for Dynamic Operation
  • Sub-Millisecond Response / Sub-Nanometer Resolution
  • UHV Compatible to 10-9 hPa
  • Superior Lifetime Even Under Extreme Conditions





Ultra-Compact Monolithic Piezo Actuators
PICMA™ Chip actuators are the smallest monolithic multilayer piezo actuators available. Providing sub-nanometer resolution and sub-millisecond response, they are ideally suited to high-level dynamic applications. PICMA™ actuators consist of a highly reliable ceramic-insulated PZT block (made of ~ 50 µm layers) with solderable terminations, and come in standard sizes as small as 2x2x2 mm³.

Optimized PZT Ceramics, Humidity Resistance
PICMA™ actuators are made from a ceramic material in which the piezoceramic properties such as stiffness, capacitance, displacement, temperature stability, leakage current and lifetime are optimally combined. The monolithic, ceramic-insulated design makes polymer-film insulation unnecessary. Diffusion of water molecules into the insulation layer, the major cause of dielectric breakdown, is greatly reduced by the use of cofired outer ceramic insulation.

Long Lifetime and High Performance-Ideal for Dynamic Operation
PICMA™ Chip actuators are superior to conventional actuators in high-endurance situations, where they show substantially longer lifetimes both in static and dynamic operation, even in harsh environments. Due to their high resonant frequency, these actuators are ideally suited for dynamic operation with light loads; an external preload is recommended for dynamic operation with larger loads. The high Curie temperature of 320 °C provides a usable temperature range extending up to 150 °C, well above the 80 °C limit of conventional multilayer actuators. At the low end, operation down to a few kelvin is possible. (with some reduction in performance specifications).

Optimum UHV Compatibility-Minimal Outgassing
The lack of polymer insulation and the high Curie temperature make for optimal ultra-high-vacuum compatibility (no measurable outgassing / high bakeout temperatures of up to 150 °C).

Amplifiers, Drivers & Controllers
PI offers a wide range of control electronics for piezo actuators from low-power drivers to multi-channel, closed-loop, digital controllers. Of course, PI also designs custom amplifiers and controllers.
  • Static and Dynamic NanoPositioning
  • Laser Tuning
  • Micro-dispensing
  • Interferometry
  • Life Sciences
  • Photonics
PICMA™ Chip actuators are the smallest ceramic-insulated multilayer piezo actuators available. Standard cross-sections range from 2x2 to 5x5 mm².

PICMA™ Chip actuators are the smallest ceramic-insulated multilayer piezo actuators available. Standard cross-sections range from 2x2 to 5x5 mm².


Dimensions in mm.

Dimensions in mm.


Technical Data / Ordering Numbers
Ordering Number*Dimensions A x B x TH in mmDisplacement [µm ±20% @ 100V]Blocking Force [N ]Electrical Capacitance [nF ±20%]Resonant Frequency [kHz]

PL022.302 x 2 x 22.2> 25025> 300

PL033.20**3 x 3 x 22.2> 300160> 300

PL033.303 x 3 x 22.2> 30050> 300

PL055.20**5 x 5 x 22.2> 500450> 300

PL055.305 x 5 x 22.2> 500250> 300

* For optional wire leads change order number extension to .x1 (e.g. PL022.31)
Resonant frequency measured at 1 Vpp, capacitance measured at 1 Vpp, 1 kHz.
Max. operating voltage: -20 to +100 V
Max. operating temperature: 150°C (** 85°C only)
Standard Mechanical Interface: ceramic (top & bottom)
Standard Electrical Interface: solderable termination
Available Options: special mechanical interfaces, etc.
Other specifications on request.
Specifications subject to change without notice.

To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

PL022.30
PICMA-Chip Ceramic Insulated Piezo Actuator, 2.2 µm, 2 x 2 x 2 mm


PL022.31
PICMA-Chip Ceramic Insulated Piezo Actuator, 2.2 µm, 2 x 2 x 2 mm, wire leads


PL033.30
PICMA-Chip Ceramic Insulated Piezo Actuator, 2.2 µm, 3 x 3 x 2 mm


PL033.31
PICMA-Chip Ceramic Insulated Piezo Actuator, 2.2 µm, 3 x 3 x 2 mm, wire leads


PL055.30
PICMA-Chip Ceramic Insulated Piezo Actuator, 2.2 µm, 5 x 5 x 2 mm


PL055.31
PICMA-Chip Ceramic Insulated Piezo Actuator, 2.2 µm, 5 x 5 x 2 mm, wire leads

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