P-561, P-562 MARS™ Piezo Nano-Scanning Stages for Scanning Microscopy

The new MARS™ Series Piezo NanoPositioning Stages are fast and highly accurate XY and XYZ scanning and positioning systems. They provide a positioning and scanning range of up to 200x200x200 µm and are equipped with capacitive feedback sensors for highest linearity, accuracy and repeatability, in the nanometer and sub-nanometer range.

Direct Drive—Ultra-Fast Scanning and Positioning
With the same footprint as the P-562, the P-561.2DD and P-561.3DD Versions provide a resonant frequency of up to 1.5 kHz in X and Y. This enables millisecond scanning rates with sub-nanometer resolution over a range of 45 µm x 45 µm ( x 11µm).

• Ultra-fast XY and XYZ Direct Drive Versions Available
• Single-Module, Parallel-Kinematics Design
• Parallel Metrology / Capacitive Feedback for Resolution <0.5 nm
• Out-of-plane motion <10nm
• 200 x 200 x 200 µm Travel Range
• 66 x 66 mm Clear Aperture
• Ultrahigh Vacuum Versions up to 10 -9 hPa Available
• Ultra-fast XY and XYZ Direct Drive Versions Available

Download Datasheet (PDF File)