NanoCube™ 350C XYZ Piezo NanoAlignment Systems

The P-615 NanoCube™ 350C is a novel, closed-loop, multi-axis Piezo NanoPositioning and alignment system. Its 350x 350x 250 µm, XYZ positioning and scanning range comes in an extremely compact package. Equipped with a zero-stiction, zero-friction guiding system, this NanoCube™ provides motion with ultra-high resolution and settling times of only a few milliseconds. Open-and closed-loop versions are offered to suit your application.

• 350x350x250 µm Closed-Loop Travel Range
• Parallel-Kinematics Design & Direct Capacitive Metrology for Highest Multi-Axis Accuracy
• 10 mm Clear Aperture
• New PICMA PZT Drive with Extended Lifetime
• 1 nm Resolution
• Ideal for Alignment and Photonics Packaging Applications
• Vacuum Compatible to 10^-6 hpa

More Information

Download NanoCube Datasheet (PDF File)