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State-of-the-Art Test &
Manufacturing Equipment 
Development and Production of Cutting-Edge Technology Products Requires Comprehensive State-of-the-Art Test Equipment

 

The following is a short list of equipment PI owns:

 

  • Industry-standard distance interferometers with variety of optics for 1D to 6D measurements
  • Sub-nanometer-resolution capacitive displacement sensor systems
  • Surface inspection interferometers
  • Electronic autocollimators
  • Computer-controlled environmental chambers
  • Non-contacting laser scanning vibrometers
  • Spectrum analyzers
  • Coordinate measuring machines
  • Room-in-room metrology lab, six-fold isolated (2 x seismically, 2 x thermally, acoustically, aerodynamically) for reproducible sub-nanometer measurements

 

PI′s state-of-the-art, six-fold-isolated, room-in-room-metrology lab. Essential for reproducible sub-nm measurements

Precision optics for sub-nm and
sub-µrad measurements
 



Component-tolerance test equipment

Checking a 6D micro-robot with an
autocollimator


Computer-controlled environmental chambers for lifetime testing

 Sophisticated Test Equipment
 to Meet the Highest Quality Standards
 
 

HP spectrum analyzers for PZT disk quality control




Video inspection equipment for PZT actuator production process


Surface structure analysis for flatness test of optics

Polytec Laser Scanning Vibrometer and 3D vibration
analysis of a MEMS component

3D CMM (Coordinate Measuring Machine)



Chemical lab for PZT formulation analysis


Laser interferometers